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Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio — Europe PMC PMID:41597794

Source: Europe PMC (en)
Original: https://europepmc.org/article/MED/41597794
DOI: 10.3390/mi17010013
License (as archived): solo-consultazione
Archived: 2026-11-07T11:10:19.398Z
SHA-256 of the archived text: 9fce2bd507d9746df4a4169ebf2a8c850b6d61f5dbe4024f9934ff74b262458d
Stable URL of this page: https://metraipolis.com/documento/dc_fa950adcf340

How to cite

Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio — Europe PMC PMID:41597794 — Europe PMC (en), https://europepmc.org/article/MED/41597794 (solo-consultazione); archived copy: https://metraipolis.com/documento/dc_fa950adcf340 (Metraipolis archive dc_fa950adcf340, sha256 9fce2bd507d9746df4a4169ebf2a8c850b6d61f5dbe4024f9934ff74b262458d)

BibTeX

@misc{dcfa950adcf340,
  title = {Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio — Europe PMC PMID:41597794},
  howpublished = {Europe PMC (en)},
  url = {https://europepmc.org/article/MED/41597794},
  note = {License solo-consultazione; archived copy https://metraipolis.com/documento/dc_fa950adcf340; sha256 9fce2bd507d9746df4a4169ebf2a8c850b6d61f5dbe4024f9934ff74b262458d},
  year = {2026}
}

Archived text

The text is not reproduced here: the archive holds it as solo-consultazione (consultation only, no republication). Read it at the original source: https://europepmc.org/article/MED/41597794. Agents can read the archived copy with the MCP tool read_document.