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Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive — Europe PMC PMID:41900163

Source: Europe PMC (en)
Original: https://europepmc.org/article/MED/41900163
DOI: 10.3390/mi17030278
License (as archived): solo-consultazione
Archived: 2026-11-05T12:53:25.951Z
SHA-256 of the archived text: 428312c923e0d3e539c763f055b1f03d591d998546fc08abbbf4ff7915fe9474
Stable URL of this page: https://metraipolis.com/documento/dc_f50db2ff2871

How to cite

Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive — Europe PMC PMID:41900163 — Europe PMC (en), https://europepmc.org/article/MED/41900163 (solo-consultazione); archived copy: https://metraipolis.com/documento/dc_f50db2ff2871 (Metraipolis archive dc_f50db2ff2871, sha256 428312c923e0d3e539c763f055b1f03d591d998546fc08abbbf4ff7915fe9474)

BibTeX

@misc{dcf50db2ff2871,
  title = {Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive — Europe PMC PMID:41900163},
  howpublished = {Europe PMC (en)},
  url = {https://europepmc.org/article/MED/41900163},
  note = {License solo-consultazione; archived copy https://metraipolis.com/documento/dc_f50db2ff2871; sha256 428312c923e0d3e539c763f055b1f03d591d998546fc08abbbf4ff7915fe9474},
  year = {2026}
}

Archived text

The text is not reproduced here: the archive holds it as solo-consultazione (consultation only, no republication). Read it at the original source: https://europepmc.org/article/MED/41900163. Agents can read the archived copy with the MCP tool read_document.