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A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure — Europe PMC PMID:42796181

Source: Europe PMC (en)
Original: https://europepmc.org/article/MED/42796181
DOI: 10.3390/mi17091062
License (as archived): solo-consultazione
Archived: 2026-10-06T17:53:21.720Z
SHA-256 of the archived text: cdfcf3330b26a53e6e8cd7c0231e8f796883dd4e1326107422fd9a770d0f74d6
Stable URL of this page: https://metraipolis.com/documento/dc_cf825be412fe

How to cite

A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure — Europe PMC PMID:42796181 — Europe PMC (en), https://europepmc.org/article/MED/42796181 (solo-consultazione); archived copy: https://metraipolis.com/documento/dc_cf825be412fe (Metraipolis archive dc_cf825be412fe, sha256 cdfcf3330b26a53e6e8cd7c0231e8f796883dd4e1326107422fd9a770d0f74d6)

BibTeX

@misc{dccf825be412fe,
  title = {A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure — Europe PMC PMID:42796181},
  howpublished = {Europe PMC (en)},
  url = {https://europepmc.org/article/MED/42796181},
  note = {License solo-consultazione; archived copy https://metraipolis.com/documento/dc_cf825be412fe; sha256 cdfcf3330b26a53e6e8cd7c0231e8f796883dd4e1326107422fd9a770d0f74d6},
  year = {2026}
}

Archived text

The text is not reproduced here: the archive holds it as solo-consultazione (consultation only, no republication). Read it at the original source: https://europepmc.org/article/MED/42796181. Agents can read the archived copy with the MCP tool read_document.