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Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors — Europe PMC PMID:41753827

Source: Europe PMC (en)
Original: https://europepmc.org/article/MED/41753827
DOI: 10.3390/mi17020170
License (as archived): solo-consultazione
Archived: 2026-11-06T11:33:13.306Z
SHA-256 of the archived text: 3e9a262731f5d93579430dc2751a48242fa1f542b71ff3eac8aed085ae4df870
Stable URL of this page: https://metraipolis.com/documento/dc_646e4deef2eb

How to cite

Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors — Europe PMC PMID:41753827 — Europe PMC (en), https://europepmc.org/article/MED/41753827 (solo-consultazione); archived copy: https://metraipolis.com/documento/dc_646e4deef2eb (Metraipolis archive dc_646e4deef2eb, sha256 3e9a262731f5d93579430dc2751a48242fa1f542b71ff3eac8aed085ae4df870)

BibTeX

@misc{dc646e4deef2eb,
  title = {Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS-SOI-MEMS Thermal Infrared Sensors — Europe PMC PMID:41753827},
  howpublished = {Europe PMC (en)},
  url = {https://europepmc.org/article/MED/41753827},
  note = {License solo-consultazione; archived copy https://metraipolis.com/documento/dc_646e4deef2eb; sha256 3e9a262731f5d93579430dc2751a48242fa1f542b71ff3eac8aed085ae4df870},
  year = {2026}
}

Archived text

The text is not reproduced here: the archive holds it as solo-consultazione (consultation only, no republication). Read it at the original source: https://europepmc.org/article/MED/41753827. Agents can read the archived copy with the MCP tool read_document.