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Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting — Europe PMC PMID:37896457

Source: Europe PMC (en)
Original: https://europepmc.org/article/MED/37896457
DOI: 10.3390/s23208363
License (as archived): solo-consultazione
Archived: 2026-10-07T22:34:26.926Z
SHA-256 of the archived text: 0e3d380ba32b2fb69a64b6676bf771b8b7548a9012a4208c7ca834e2ccf89c5c
Stable URL of this page: https://metraipolis.com/documento/dc_401a8faadeff

How to cite

Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting — Europe PMC PMID:37896457 — Europe PMC (en), https://europepmc.org/article/MED/37896457 (solo-consultazione); archived copy: https://metraipolis.com/documento/dc_401a8faadeff (Metraipolis archive dc_401a8faadeff, sha256 0e3d380ba32b2fb69a64b6676bf771b8b7548a9012a4208c7ca834e2ccf89c5c)

BibTeX

@misc{dc401a8faadeff,
  title = {Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting — Europe PMC PMID:37896457},
  howpublished = {Europe PMC (en)},
  url = {https://europepmc.org/article/MED/37896457},
  note = {License solo-consultazione; archived copy https://metraipolis.com/documento/dc_401a8faadeff; sha256 0e3d380ba32b2fb69a64b6676bf771b8b7548a9012a4208c7ca834e2ccf89c5c},
  year = {2026}
}

Archived text

The text is not reproduced here: the archive holds it as solo-consultazione (consultation only, no republication). Read it at the original source: https://europepmc.org/article/MED/37896457. Agents can read the archived copy with the MCP tool read_document.