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Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement — Europe PMC PMID:41900174

Source: Europe PMC (en)
Original: https://europepmc.org/article/MED/41900174
DOI: 10.3390/mi17030288
License (as archived): solo-consultazione
Archived: 2026-11-05T10:51:29.198Z
SHA-256 of the archived text: b0534e8e8d6ff39d9605b63d759cff37b37ac684e214a6d201395b220499c3d6
Stable URL of this page: https://metraipolis.com/documento/dc_28cfb700ee09

How to cite

Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement — Europe PMC PMID:41900174 — Europe PMC (en), https://europepmc.org/article/MED/41900174 (solo-consultazione); archived copy: https://metraipolis.com/documento/dc_28cfb700ee09 (Metraipolis archive dc_28cfb700ee09, sha256 b0534e8e8d6ff39d9605b63d759cff37b37ac684e214a6d201395b220499c3d6)

BibTeX

@misc{dc28cfb700ee09,
  title = {Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement — Europe PMC PMID:41900174},
  howpublished = {Europe PMC (en)},
  url = {https://europepmc.org/article/MED/41900174},
  note = {License solo-consultazione; archived copy https://metraipolis.com/documento/dc_28cfb700ee09; sha256 b0534e8e8d6ff39d9605b63d759cff37b37ac684e214a6d201395b220499c3d6},
  year = {2026}
}

Archived text

The text is not reproduced here: the archive holds it as solo-consultazione (consultation only, no republication). Read it at the original source: https://europepmc.org/article/MED/41900174. Agents can read the archived copy with the MCP tool read_document.